Scanning electron beam microscope

Scanning electron beam microscope

TypeTescan LYRA XMU
ClassSurface analyzer
Responsibleprof. Ing. Radimír VRBA, CSc.

LYRA XMU Tescan electron microscope. The microscope uses the high brightness auto-emission Schottky cathode and it is intended for the high-resolution imaging of both conducting and non-conducting samples. This system is integrated with a focused Ga ion beam (FIB). The model features an XM chamber for a comfortable investigation and positioning of the sample thanks to a fully-motorized five-axes manipulator and ideal geometry for both EDX and EBSD.
First-class scintillation YAG-based detectors. Investigation of non-conducting samples in the low-vacuum mode and excellent results on magnetic samples. Integrated active cushioning for an efficient reduction of vibrations in the laboratory.