Oxford WAVE 500 INCA, the elemental fully focused wavelength dispersive spectrometer, has a resolution better than 2 eV and detection limit less than 100 ppm. It contains 4 crystals (220 LIF, PET, TAP, LSM 060) mounted on a horizontally arranged Rowland circle, which ensures the high reproducibility of outputs. The detector is combined with an energy dispersive spectrometer X-Max 50 SDD with a resolution better than 136 eV at Mn Kα lines. Overall, the system is able to detect elemental range Be – Am. The system works on software platform AZTEC with possibilities of qualitative and quantitative analysis, mapping of selected areas of the sample and solution of peeks overlaps and direct reports from the measurements.