|Responsible||prof. Ing. Radimír VRBA, CSc.|
The deposition chamber uses a chemical vapor deposition process to grow vertically aligned carbon nanotubes (CNTs). Automatic pressure and vacuum control products enable precise control of process pressure by electronically actuating valves that control flow of gases in the process chamber. The concentration of acetylene, oxygen and nitrogen within the chamber are thus precisely defined. For safe use in the laboratory condition is the chamber also equipped with a cold trap to capture fumes. The chamber will be mainly used for the deposition of vertically aligned carbon nanotubes using decomposition of acetylene.